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What’s EPMA ?

Electron Probe Micro Analyzer(EPMA) is one of the instruments to analyze solid substances. EPMA works by bombarding a sample with an accelerated and focused electron beam that cause various interactions between the electron of beam and the atoms of all elements included in the sample.

EPMA can do fully qualitative and quantitative analysis at the micro-sized volumes of the surface of sample. Generally most of analytical instruments can do only qualitative and quantitative analysis, but EPMA has more analysis modes than any other instruments. Not only qualitative and quantitative analysis but also EPMA can do line analysis, mapping analysis and state analysis.

Fig 1. Show bombarding a sample with an accelerated and focused electron beam

Fig 2. Results of qualitative and quantitative analysis by EPMA

Fig 3. Results of mapping analysis

EPMA is the hybrid instrument combining the capabilities of SEM (scanning electron microscope) and elemental analyzer but EPMA provides much better results compared with SEM/EDS by WDS (EDS) spectrum, higher spectrum resolution and sensitivity.

Fig 4. Model EPMA-1720H and EPMA-8050G commonly of Shimadzu

Today EPMA is widely used for Q&A and R&D in various fields, please refer below table.

Fields	Main Applications
Mining	Ore analysis, etc.
Construction	Concrete analysis (reaction to alkaline aggregates, sale damage, etc.)
Fibers	Distribution of particles contained among fibers (for commuter footwear)
Pulp and Paper	Observation and analysis of coated paper cross sections, etc.
Pharmaceuticals	Analysis of foreign matter content, discoloration, or other defects, new drug development, etc.
Rubber Products	Analysis of foreign matter content, discoloration, or other defects, new material development, etc.
Ceramics (glass, etc.)	Analysis of glass striae or other defects, new material development, etc.
Steel	Analysis of segregation, inclusions, or other defects, new material development, etc.
Nonferrous Metals	Analysis of segregation, inclusions, or other defects, new material development, etc.
Electrical/Electronic Goods	Defect analysis at the part level or new product development
Transportation Equipment	Defect analysis at the part level or research of LIB/catalysts, etc.
Electricity and Gas	Catalyst and other energy-related research

Please contact us for advice and more information.

(Reference from application News - Shimadzu Corporation)

Source: ETA

News

What’s EPMA ?

Electron Probe Micro Analyzer(EPMA) is one of the instruments to analyze solid substances. EPMA works by bombarding a sample with an accelerated and focused electron beam that cause various interactions between the electron of beam and the atoms of all elements included in the sample.

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